Fully Ink-jet Printed Capacitive Pressure Sensor
作者: Kisic M.;Blaz N.;Zlebic C.;Zivanov L.;Nikolic I.;
摘要:
In this paper a capacitive pressure sensor with two flexible membranes is presented. The sensor consists of two electrodes on membranes, a spacer and an additional dielectric layer between the electrodes. The sensor is fully printed in an ink-jet printing technology using a nanoparticle silver ink. The polyimide foils are used as membranes, a spacer of the sensor and a dielectric isolation layer. With the pressure applied on the electrodes, the polyimide membranes deflect reducing distance between the electrodes and therefore increasing the capacitance of the sensor which serves as a measure of the pressure applied on the sensor. The fabricated sensor is tested and the measured characteristic of the sensor is presented. The pressure is measured up to 1 bar and the obtained sensitivity of the proposed sensor is 16.7 pF/bar. © 2017 IEEE.
DOI:
10.1109/ISSE.2017.8000994
关键词:
Capacitive sensors; Chemical sensors; Electrodes; Ink; Ink jet printers; Partial pressure sensors; Polyimides; Pressure sensors; Silver; Capacitive pressure sensors; Dielectric isolation; Dielectric layer; Fabricated sensors; Flexible membranes; Ink-jet printing technologies; Nano-particle silver; Polyimide membranes; Ink jet printing;
年份:
2017
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